Mainz 1997 – wissenschaftliches Programm

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P: Plasmaphysik

P 14: Postersitzung II

P 14.27: Poster

Dienstag, 4. März 1997, 18:00–20:00, Foyer

Diagnostics and modelling of a planar magnetron sputter source — •A. Neuffer¹, A. Lunk¹, and M. Rabinski² — ¹Institut f"ur Plasmaforschung, Universit"at Stuttgart, Pfaffenwaldring 31, 70569 Stuttgart Institut f"ur Plasmaforschung, Universit"at Stuttgart, Pfaffenwaldring 31, 70569 Stuttgart — ²Institute for Nuclear Studies, P1-05-400 Otwock-Swierk

In a planar magnetron sputter device plasma parameters were measured spatially resolved by plane and cylindrical LANGMUIR probes and emission spectroscopy. The sputtering gases used are argon and argon/methane mixtures in a pressure range between 0.2 and 1.6 Pa. The target material was titanium. In the magnetized region (the electric field is directed toward the cathode) the electron energy distribution function shows two groups of electrons. The group with the lower energy is nearly a Maxwellian one. The second group has a higher most probable energy depending on the pressure of the sputtering gas. The drift current was measured by a plane probe. With decreasing pressure the drift current increases up to two times of the discharge current. For comparison with experimental results a one dimensional two fluid model was developed. The model includes continuity-, momentum transfer-, energy balance- as well as POISSON-equation for the potential. For non-linear terms the first order TAYLOR expansion was used while the convective terms were discretized according to the upstream scheme of donor cell type.