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DF: Dielektrische Festkörper

DF IV: HV IV

DF IV.1: Hauptvortrag

Donnerstag, 20. März 1997, 10:15–10:55, R2

Self regulated piezoelectric microsystems: experiments and modelling — •Philippe Gaucher — Thomson CSF–LCR, Domaine de Corbeville, F–91404 Orsay Cedex, France

The direct and converse piezoelectric effects in micro–electromechanical systems can be used for making self regulated devices with a very simple closed loop control law. The transfer function between a piezoelectric sensor and a piezoelectric actuator has been modelled by analytical methods and simulated with the Matlab Simulink software. Realizations are shown using bulk ceramics; screen printed thick films on metallic substrates and micro–patterned solgel thin films on silicon. The applications are in active vibration control and electromagnetic smart skins for conformal radar antennas.
Also non linear materials like electrostrictive relaxor materials have been studied, which have an additional degree of freedom because of their tunability with a bias volage.