Regensburg 1998 – wissenschaftliches Programm

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DS: Dünne Schichten

DS 23: Laserverfahren III

DS 23.2: Fachvortrag

Freitag, 27. März 1998, 11:30–11:45, H 31

Preparation of textured LiNbO3 thin films by off-axis laser deposition — •Kerstin Kaemmer and Ludwig Schultz — Institute of solid state and material science,P.O.Box,01171 Dresden

We report on the preparation of lithium niobate thin films on R-cut and (0001) sapphire single crystalline substrates using the off-axis laser deposition. X-ray diffraction in Bragg-Brentano geometry and in a microdiffractometer with area detector were used to characterize the crystallography, the texture and the lateral homogeneity of the films. The LiNbO3 (LN) thin films were prepared using a KrF eximer laser (248 nm). The target was a Li-enriched Li2NbO3 ceramics. The substrates were radiatively heated in a tube-like oven with the substrate perpendicular to the target surface. For the preparation of thin films the deposition temperature and the oxygen background pressure was varied. The films grew textured and oriented on the substrates used. For thin films on Al2O3 (0001) substrates we found only (0001) reflexes of film and substrate in the Bragg-Brentano diffractometer. This suggests that the films are unequivocal textured and consist of single LN phase. But the investigations with microdiffractometer showed that there are other textured phases in the films. Thin films deposited on sapphire substrates consist of different mixtures of the LN phase and the LiNb3O8 phase dependent on the oxygen pressure of the ambient atmosphere and the substrate temperature.