Regensburg 1998 – wissenschaftliches Programm
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DS: Dünne Schichten
DS 24: Postersitzung
DS 24.37: Poster
Donnerstag, 26. März 1998, 15:00–19:00, PF A
Influence of Growth Parameters on the Roughness and Morphology of Grown Surfaces — •H. Ketterl1,2, W. E. Hagston2, and W. Prettl1 — 1Institut fűr Experimentelle und Angewandte Physik, Universitat Regensburg, 93040 Regensburg, Germany — 2Department of Physics, University of Hull, HU6 7RX, UK
A Monte Carlo simulation of various models of surface growth is undertaken and a detailed investigation of the effects of the angle of incidence, turnspeed, non-uniform distribution of particles and the mobility of particles is carried out. The influence of these parameters on the surface roughness and the concentration of vacancies is described. This leads to an optimization process for the growth depending on whether a smooth interface or a low concentration of vacancies is required.