Regensburg 1998 – wissenschaftliches Programm

Bereiche | Tage | Auswahl | Suche | Downloads | Hilfe

DS: Dünne Schichten

DS 24: Postersitzung

DS 24.42: Poster

Donnerstag, 26. März 1998, 15:00–19:00, PF A

Photoluminescence properties and excitation spectra of a-C:H thin films — •J. Seekamp¹, N. Tomozeiu², J. Niemann¹, J. Robertson³, and W. Bauhofer¹ — ¹Arbeitsbereich Materialien der Mikroelektronik, Technische Universität Hamburg-Harburg, D-21071 Hamburg — ²Department of Engineering, University of Cambridge, Trumpington Street, Cambridge CB2 1PZ — ³Department of Engineering, University of Cambridge, Trumpington Street, Cambridge CB2 1PZ

We studied the photoluminescence (PL) of a-C:H thin films. These films were deposited in a PECVD process at 13.56MHz from methane diluted by helium. The PL was excited by light of energies between 2.0eV and 5.6eV. In addition transmission and reflection in the UV and visible were measured. FTIR spectra were taken for the structural analysis of the films. We found a luminescence with maxima from the UV-region of the spectrum down to 2.6eV. In our contribution the optical properties and their relation to changes in structure detected in the IR absorption spectra are discussed.