Regensburg 1998 – scientific programme

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HL: Halbleiterphysik

HL 24: Poster II

HL 24.35: Poster

Wednesday, March 25, 1998, 10:30–19:00, A

Thermochemical Polishing of Diamond — •Alexander Zaitsev, Gaby Kosaca, Frank Blum, and Wolfgang R. Fahrner — FernUniversit"at Hagen, Lehrgebiet Bauelemente der Elektrotechnik, Haldener Str. 182, 58084 Hagen

To avoid the disadvantages of the conventional polishing methodes of diamond a new setup for thermochemical polishing of diamond films on hot vibrating steel plate has been developed. The capability of the instrument and the polishing process have been investigated on free standing polycristalline CVD diamond films by flat polishing of large area samples (10x10 mm²). The mechanism of the thermochemical treatment is studied by Raman spectroscopy and cathodoluminescence taken at different stages of the polishing process. The thermochemical process is described as a conversion of diamond into nondiamond carbon by the hot metal with a subsequent solution of this carbon in the metal. The thermochemical treatment is shown also as a methode for revealing of non-diamond inclusions in CVD diamond films.