Regensburg 1998 – scientific programme

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O: Oberflächenphysik

O 30: Hauptvortrag

O 30.1: Invited Talk

Thursday, March 26, 1998, 15:15–15:45, H36

Self-organization of nanostructures on semiconductor surfaces — •V. Shchukin — Institut für Festkörperphysik, TU Berlin, Hardenbergstr. 36, D-10623 Berlin

A review is given of theoretical concepts and experimental results on spontaneous formation of periodic nanometer-scale structures on semiconductor surfaces. Various classes of nanostructures are considered, namely
i) periodically faceted surfaces,
ii) periodic surface structures of planar domains (monolayer-height islands),
iii) ordered arrays of three-dimensional coherently strained islands (quantum dots),
iv) multi-layered arrays of 2D islands,
v) multi-layered arrays of 3D islands.
It is shown that the common driving force for the long-range ordering of the inhomogeneous phase is the elastic interaction. Single-layered structures are considered as equilibrium ones. In multi-layered systems an equilibrium structure of islands is formed in the first layer, and the partial equilibrium is realized in successive layers where structures of surface islands are formed in the strained field created by the buried islands. Experimental situation is discussed in fabrication technology of ordered arrays of semiconductor quantum dots, where both single-layered and multi-layered arrays are considered.