Regensburg 1998 – wissenschaftliches Programm
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O: Oberflächenphysik
O 34: Poster (II)
O 34.39: Poster
Donnerstag, 26. März 1998, 20:00–22:30, Bereich C
ARXPS– and SFM–Studies of galvanic and sputter deposition of metals on TiO2 and on plastics — •P. Henzi, M. Regier, K. Bade, G. Schanz, and J. Halbritter — Forschungszentrum Karlsruhe, Institut für Materialforschung I+III and Institut für Mikrostrukturtechnik, Postfach 3640, D-76021 Karlsruhe
In the development of microsystems, the LIGA technique plays nowadays and
perhaps
even more in the future an important role.
As essential steps of the LIGA technique, sputtered Ni films on
synthetics –as
starting point for following galvanic metallisation– and galvanic
deposition of
metals on TiO2 are studied. The nucleation and the properties of these
deposited
layers are examined by angle resolved X-ray photoelectron spectroscopy
(ARXPS) and
scanning force microscopy (SFM). Whereas by ARXPS chemical depth profiling
(qualitative identification and quantification of the involved elements and
compounds) but only some lateral resolution is possible, the SFM-technique
delivers
images with an excellent topographical resolution.
By using these two complementary informations, we got knowledge of the
adhesion and
wetting properties, which should help to improve the depositon conditions.