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DS: Dünne Schichten

DS 35: Harte Schichten IV

DS 35.1: Hauptvortrag

Donnerstag, 30. März 2000, 14:00–14:45, H32

Recent progress in plasma nitriding — •J. Musil and J. Vlček — Department of Physics, University of West Bohemia, P.O. 314, 30614 Plzeň, Czech. Republic

Plasma nitriding is a standard process used for surface hardening of many different mechanical parts made of metal. In this process the nitrided part is the cathode of nitriding discharge. Recently, it was shown that almost the same hardness can be achieved in an anodic plasma nitriding process when a nitrided part is the anode of the nitriding discharge. This finding is of principal importance because it shows that (1) the main role in plasma nitriding process play active neutral species, (2) the surface of nitrided part can be enriched by material from the auxiliary cathode which is sputtered in the nitriding discharge and (3) an efficient nitriding at low pressures of about 0.1 Pa is possible. A new plasma nitriding system with an auxiliary cathode and a low-pressure plasma nitriding in microwave discharge are described. Special attention is devoted to (1) a formation of superhard (more than 40 GPa) nonacomposite coatings on steel surfaces, (2) duplex coatings and (3) a protection of aluminium. New trends in this field are outlined.