Berlin 2001 – scientific programme

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K: Kurzzeitphysik

K 3: Pulsed power technology

K 3.1: Fachvortrag

Tuesday, April 3, 2001, 17:50–18:20, EB107

Pulsed Power Technology for Excimer Lasers — •Andreas Görtler — TuiLaser AG, Industriestrasse 15, D-82110 Germering; www.tuilaser.com

In recent years excimer lasers have reached a mature state of development which enabled their use for a large variety of industrial applications. In particular, their employment as a light source in steppers and scanners for deep UV lithography for the production of micro chips has initiated new technological developments. Beside substantial upgrades and improvements of the laser tube, novel concepts for the pulsed-power modules were also realized recently. The use of semiconductors has led to nearly unlimited component lifetimes and to repetition rates on the order of several kHz. A short overview of the basics of excimer laser principles and design will be given. The different concepts of the main electrical circuit are described and their advantages and disadvantages are discussed. Finally, an overview of the state-of-the-art of excimer laser technology will be presented, with particular emphasis on compact mini excimer lasers.