Berlin 2001 – scientific programme

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K: Kurzzeitphysik

K 5: Laser material processing

K 5.1: Fachvortrag

Thursday, April 5, 2001, 17:20–17:50, EB107

Microstructuring on the surface and in the volume of silicate glasses with laser radiation of short pulse length — •Wolfgang Kreutz, Michael Jaquorie, and Alexander Horn — RWTH Aachen, Steinbachstr. 15, 52074 Aachen

Microstructures in soda lime glass and borsilicate glass are produced with pulsed Nd:YAG laser radiation (λ = 532 nm / 1064 nm,τ = 40 ps) and ArF excimer laser radiation (λ = 193 nm, τ = 20 ns). Ineraction between laser radiation and the glass subtrates results in generation of cracks in the surface. The dynamics and the transmission of the expanding plasma and changes in the refractive index of the glass are investigated with Speckle photography in the pump and probe method. The determination of plasma emission and crack generation is carried out with high speed- and Nomarski photography. Physical and chemical properties of the deposits gnerated under defined processing gas atmospheres are measured with REM and white light interferometry as well as XPS and EPMA. On the basis of these investigation the processes for generation of cracks and deposits and the quality of the generated microstructures are discussed.