Berlin 2001 – scientific programme

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P: Plasmaphysik

P 10: Theory and Plasma Diagnostic (Poster Session)

P 10.20: Poster

Wednesday, April 4, 2001, 12:30–15:00, AT2

Spatial number density profiles of oxygen atoms and their flow to the walls in an rf discharge — •Silke Peters, Bert Krames, and Jürgen Meichsner — Institut für Physik, Universität Greifswald, Domstr. 10a, D-17489 Greifswald, Germany

The detection of oxygen atoms in low temperature rf plasmas and the determination of their number densities can be done by the well known two photon absorption laser induced fluorescence technique, TALIF. We used this method for the determination of spatial density distributions in our rf discharges and for investigations of the plasma-surface interaction. The excellent spatial and spectral resolution of the laser methods allow exact determination of the densities near to the surfaces, characterizing the flow to them. The specified flow rates can be used for calibration of our investigations with appearance potential mass spectrometry to absolute number densities (see also poster by M. Geigl et al.).

We present axial and radial density profiles of O-Atoms and their influence on the particle flow to the surfaces for various discharge parameters in our apparatus with variable spacing between the parallel plate electrodes.

We acknowledge generous support by the Deutsche Forschungsgemeinschaft through the Sonderforschungsbereich 198, A13.