Berlin 2001 – wissenschaftliches Programm

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P: Plasmaphysik

P 11: Dusty Plasmas and Low Temperature Discharges (Poster Session)

P 11.23: Poster

Donnerstag, 5. April 2001, 12:30–15:00, AT2

Electrical and Spectroscopic investigation of medium and high pressure CCRF-discharges — •Jochen Schulze, Dirk Teuner, and Jürgen Mentel — Ruhr-Universität Bochum, Arbeitsgruppe für Grundlagen der Elektrotechnik, D-44780 Bochum

A capacitively coupled radio frequency discharge is operated in several gas mixtures and noble gases at pressures between 1 kPa and 100 kPa. The electrical power is fed into cylindrical tubes made of Aluminiumoxide with metallic electrodes extending parallel to the tube axis at the outer surface of the tube. The complex impedance of the discharge is matched with a tunable network to the 50 ohm impedance of the generators operating at 13.56 MHz respectively. Using this setup a diffuse discharge can be operated at pressures up to 100 kPa. The discharge is homogeneous along the tube axis, however, structured perpendicular to it. This structure is investigated in dependence on the filling gas pressure by electrical and spectroscopic measurements.

Supported by the Deutsche Forschungsgemeinschaft (SFB 191, A 10) and the Science for Peace Project of the NATO (SfP 971989).