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Berlin 2001 – scientific programme

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P: Plasmaphysik

P 11: Dusty Plasmas and Low Temperature Discharges (Poster Session)

P 11.8: Poster

Thursday, April 5, 2001, 12:30–15:00, AT2

Characterisation of a large helicon source with multipole magnetic confinement — •Michael Krämer, Bernd Clarenbach, Waldemar Kaiser, and Bernd Lorenz — Experimentalphysik II, Ruhr-Universität Bochum, D-44780 Bochum

First experimental results obtained on a large volume plasma produced by helicon wave coupling are presented. The device consists of a helicon source section connected with a large stainless steel chamber (dch = 60  cm, lch = 80  cm) which contains a magnetic multipole field configuration consisting of 10 rings of permanent magnets (distance = 8  cm, diameter = 54  cm). The discharge vessel is a quartz tube (dp = 14.6  cmlp = 110  cm) surrounded by 16 electromagnet coils producing a homogeneous magnetic field. The helicon plasma is produced via an m = 1 helical antenna driven by RF power pulses (τpulse = 2 − 3  msfpulse = 25 − 100  Hz, PRF < 3  kW,   fRF = 13.56   MHz). Such antennas reveal a pronounced axial asymmetry, so that, in case of proper magnetic field direction, the plasma is injected into the chamber where typical discharge densities ne = O(1018  m−3) are achieved. Langmuir and energy analyzer probe diagnostics, 1 mm interferometry as well as emission spectroscopy were applied to measure the distribution of the plasma parameters in the chamber for different antenna positions in a wide range of magnetic field strengths (B0 < 0.1  T) and argon gas pressures (p = 0.1 − 2  Pa).

This work was supported by the Deutsche Forschungsgemeinschaft through the Sonderforschungsbereich 191 (Projekt A12)

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