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P: Plasmaphysik

P 12: Plasma Wall Interaction, Diagnostic and Low Temperature Discharges (Poster Session)

P 12.4: Poster

Freitag, 6. April 2001, 12:30–15:00, AT2

Energy distribution of oxygen ions in a magnetron discharge — •Tobias Röwf, Jochen Deiwiks, Hartmut Steffen, Holger Kersten, and Rainer Hippler — Institute for Physics, University of Greifswald, Domstr. 10 A, D-17489 Greifswald, GERMANY

The energy distribution of oxygen ions in a direct current (DC) magnetron discharge was investigated with the help of an energy-dispersive mass spectrometer (plasma monitor). The DC-magnetron discharge was operated at a constant power of 30 W in a combined argon and oxygen atmosphere. A target made of indium-tin (ratio 9:1) was used. Particles produced by the magnetron discharge travelled through a 0.1 mm orifice into the plasma monitor (Balzers PPM 421).

Negative oxygen ions with low (0-70 eV) and high (400-500 eV) kinetic energies were detected. The high-energy component results from sputter processes at the negatively biased target of the magnetron. The measured distributions are compared with the Thompson formula [1] and with model calculations (TRIM).

[1] M.W. Thompson, Philos. Mag. 377 (1968) 18.