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P: Plasmaphysik

P 8: Magnetic Confinement and Plasma Technology (Poster Session)

P 8.22: Poster

Montag, 2. April 2001, 12:30–15:00, AT2

Study of (Ne+H₂) plasma in a hollow cathode and in a positive column glow discharges — •Vesselina Gencheva¹, Valentin Mihailov¹, Renna Djulgerova¹, Karol Musiol², Stefan Labus², and Lukas Bratasz² — ¹Institute of Solid State Physics - Bulgarian Academy of Sciences 72 Tzarigradsko Chaussee blvd., 1784 Sofia, Bulgaria — ²Institute of Physics of Jagellonian University 4 Reymonta, 30-039 Krakow, Poland

Mixtures of H₂ and other gases are used when glow discharges are applied in material processing technologies. There the negative ions play an important role and the knowledge of their formation and destruction processes is necessary for working condition optimization. We have made theoretical description of Ne+H₂ plasma in both hollow cathode and positive column glow discharges. As a result the concentration of H⁻, Ne⁺, H, H⁺, H₂⁺, the population of excited Ne levels and excited vibrational H₂ states are obtained. One can conclude from these models that the main processes for H⁻ formation in the glow discharges under studying are the dissociative and electron attachment. The main processes for H⁻ destruction are the Ne⁺ and H⁻ recombination and the collisions between H⁻ and H₂ in hollow cathode discharge and also the H⁻ diffusion in the positive column discharge. The obtained theoretical results for H⁻ concentration as a function of H₂ concentration in (Ne+H₂) mixtures are compared with the measured by us values using photodetachment method.