Berlin 2001 – wissenschaftliches Programm

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P: Plasmaphysik

P 9: Dense Plasmas and Plasma Diagnostic (Poster Session)

P 9.17: Poster

Dienstag, 3. April 2001, 12:30–15:00, AT2

Electrical measurements in an argon-filled capacitively coupled GEC-plasma cell — •C. Pargmann and H. Soltwisch — Institut für Experimentalphysik V, Ruhr-Universität Bochum, Germany

For the purpose of comparison, measurements in different plasma cells are mostly characterized by their external parameters such as the pressure, the gas flow and the power supplied by the generator. However, the supplied power will differ from the power coupled into the plasma, due to stray impedances associated with the electrical connections, the matching network and the electrodes. A model has been developed to calculate the current and voltage waveforms at the electrodes from the current and voltage waveforms measured at easily accessible places of the cell assembly. With the help of these calculations and measurements of the floating potential the impedances of the plasma sheaths and the distribution of the current and the voltage in an argon plasma are determined.