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Verhandlungen
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DPG

Berlin 2001 – wissenschaftliches Programm

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P: Plasmaphysik

P 9: Dense Plasmas and Plasma Diagnostic (Poster Session)

P 9.19: Poster

Dienstag, 3. April 2001, 12:30–15:00, AT2

Investigation of reactive plasmas in an inductively coupled GEC reference cell by absorption spectroscopy — •I. Möller, Y. Ivanov, and H. Soltwisch — Institut für Experimentalphysik V, Ruhr-Universität Bochum, Germany

Hydrocarbon plasmas with admixtures of oxygen are widely used in technical applications although the understanding of the complex kinetics is far from being complete. Densities and temperatures (Ttrans und Trovib) of molecular species can be derived directly by absorption spectroscopy. The required sub-Doppler resolution is ensured by the usage of tunable diode lasers.
Measurements in an inductively coupled GEC reference cell with methane and oxygen as feed gases are presented. The dependency of molecular densities on external parameters as the applied power, the flow rate and the gas composition is shown in comparison to results from a capacitively coupled plasma where the behaviour of the source gases and an intermediate species (CH3) is explainable by simple rate equations.

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