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DS: Dünne Schichten

DS 18: Ionenimplantation IV

DS 18.3: Vortrag

Donnerstag, 29. März 2001, 14:30–14:45, S 5.1

Ionic nitriding of steels with the aid of high aperture Hall current accelerator — •Tatjana Ischenko¹, Boris Straumal², Milan Friesel³, Sergei Polyakov^2,4, and Wolfgang Gust⁴ — ¹GPI RAS, Moscow, Russia — ²ISSP RAS, Chernogolovka, Russia — ³Chalmers Univ. Technol., Gothenburg, Sweden — ⁴Institut fuer Metallkunde, Stuttgart, Germany

Ionic implantation technologies play an important role for the surface modification of materials. Recently, a novel Hall current accelerator has been developed. The accelerator has a large aperture of 1400 mm and a power up to 10 kW. High ionic currents up to 1 mA/cm2 permit to use the source both for ion implantation and for ionic cleaning of substrates. Various gases can be used for both purposes: argon, nitrogen, oxygen, etc. The current-voltage characteristics for nitrogen at various pressures are presented. The ionic nitriding of austenitic stainless steel and ferritic low-carbon steel has been studied. The depth profiles measured with the aid of secondary-ion mass spectroscopy are presented. The hardness after ionic nitriding is characterized, the mechanism of the irradiation -enhanced nitrogen penetration in the austenitic stainless steel is discussed. The financial support of the INTAS Programme and Alexander von Humboldt Foundation is acknowledged.