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DS: Dünne Schichten

DS 29: Schichteigenschaften VI

DS 29.2: Hauptvortrag

Freitag, 30. März 2001, 11:00–11:45, S 13/14

X-ray diffraction and X-ray reflectivity applied to investigation of thin films — •David Rafaja — Mathematisch-physikalische Fakultät der Karlsuniversität, Ke Karlovu 5, CZ 121 16 Prag

During the last decades, X-ray diffraction became a well- established tool for investigation of real structure of thin films. The main reason is the high absorption of X-rays in solids, which yields penetration depth of X-rays being in the micrometer or sub-micrometer range. Such a penetration depth is well comparable with the typical thickness of thin films. To get more information on surface layers, the penetration depth of X-rays can further be decreased if the angle of incidence of the primary beam approaches the angle of the total external reflection.

The goal of the talk is to present applications fields of X-ray diffraction and X-ray reflectivity for investigation of thin films - phase analysis, residual stress measurement, analysis of the crystallite size and texture, measurement of thickness, study of the interface quality and morphology. Further, a method for investigation of structural gradients in thin films will be discussed. The above techniques will be illustrated on examples of PVD and CVD coatings, functionally graded tools prepared in a diffusion process, magnetic multilayers and large two-dimensional structures.