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DS: Dünne Schichten

DS 31: Postersitzung

DS 31.52: Poster

Dienstag, 27. März 2001, 16:30–17:30, Foyer Saal 4

Sputtered Multilayer X-ray Mirrors for the Water Window — •Alexei Nefedov¹, Hartmut Zabel¹, and Franz Schaefers² — ¹Inst. f. Exp. Physik IV, Ruhr-University Bochum, D-44780 Bochum — ²BESSY GmbH, Albert-Einstein-Str. 15, D-12489 Berlin

Multilayers with periods in the range of 1-2 nm are currently of great interest. Moreover, the interest in multilayers containing a 3d-transition element (Sc, Ti, V, Cr) is called forth by the high reflection in the range of the anomalous dispersion at their 2p-absorption edge. This is related to their widespread use as normal incidence reflectors for x-ray microscopy in the water window and polarizers for synchrotron radiation. V/Al2O3 and Ti/Al2O3 multilayers were deposited by rf sputtering (13.56 MHz) in a high-vacuum environment and then these multilayers were characterised using hard x-rays (CuK radiation) and tuneable synchrotron radiation in the soft x-ray range. The measurements were performed using the BESSY UHV-reflectometer chamber at the beamline PM4. An excellent performance was measured close to the 2p absorption edge, where the reflectance and energy resolution is resonantly enhanced. The V/Al2O3 multilayer exhibits a strong enhancement of both energy resolution and peak reflectance at the V 2p absorption edge reaching high values up to R=0.18.