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HL: Halbleiterphysik

HL 29: Neue Materialien und Verfahren

HL 29.1: Vortrag

Donnerstag, 29. März 2001, 10:30–10:45, S17

Nanomechanical Resonators in Silicon with Single Electron Tunneling Functionality — •Dominik Scheible, Laura Pescini, Artur Erbe, and Robert Blick — Center for NanoScience, Sektion Physik, Ludwig-Maximilians Universität, Geschwister-Scholl-Platz 1, 80539 München

Nanomechanical resonators possessing a high quality factor provide a very precise tool for an oscillating displacement of metallic islands, which enable single electron shuttling [A. Erbe et al. cond-mat/0011429]. In addition, the mechanical properties can be tuned via capacitive coupling. In this talk we present basic background, layout and manufacturing techniques of high-Q resonators. We discuss measurements on mechanical tuning as well as the observed tunneling current. The respective structures have natural frequencies in the RF-range (up to 120 MHz). This work is funded by the Deutsche Forschungsgemeinschaft, project BL-487.