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HL: Halbleiterphysik

HL 29: Neue Materialien und Verfahren

HL 29.2: Vortrag

Donnerstag, 29. März 2001, 10:45–11:00, S17

Investigation of nanomechanical resonators using Surface Acoustic Waves — •F.W. Beil¹, E. Höhberger¹, A. Hörner¹, A. Wixforth¹, R.H. Blick¹, W. Wegscheider², and M. Bichler³ — ¹CENS LS Kotthaus, LMU München, Geschwister-Scholl Platz 1, 80539 München — ²Institut für Angewandte und Experimentelle Physik, Universität Regensburg, 93040 Regensburg — ³Walter Schottky Institut der Technischen Universität München, Am Coulombwall, 85748 Garching

Nano-electromechanical systems (NEMS) are widely investigated due to their use as tools for sensors and communication technology. These applications require high sensitivities, which results in an increased interest in damping mechanisms of NEMS. One approach to reduce damping in NEMS considers a new method of driving these structures at their resonance frequency. Surface acoustic waves (SAW) promise to be a suitable tool for this without electrical losses. This approach takes advantage of the fact that typical values of the displacement of the resonators are of the same magnitude as the SAW amplitude. We want to present investigations of several NEMS on semiconductor materials. We will compare measurements with numerical models of Silicon resonators operating in the MHz regime. First measurements of GaAs-NEMS are also presented and compared to numerical models.