Hamburg 2001 – wissenschaftliches Programm

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O: Oberflächenphysik

O 200: Gaedepreis-Vortrag

O 200.1: Hauptvortrag

Dienstag, 27. März 2001, 14:30–15:15, B

What You See Is What You Grow - Optical Sensors for Semiconductor Epitaxy — •J.-Thomas Zettler — Technische Universität Berlin, Institut für Festkörperphysik, Hardenbergstr. 36, 10623 Berlin

This talk is reviewing the recent development of surface optical techniques from pure surface science applications to industrial real-time growth sensors.

During the last decade, surface optical techniques have extended the traditional ultra-high vacuum based surface science studies to surfaces in gas phase environments. They are typically utilizing surface symmetry effects and/or surface stoichiometry modulation for supressing the contribution of the bulk below. Consequently, even if light is used having a wavelength of several hundreds of nanometers, one is capable of sensing surface processes (reconstruction, adsorption, desorption, epitaxial growth) on the scale of less than a single atomic monolayer. This surface sensitivity through gas phases is, however, not only of interest for basic studies. Epitaxial growth processes for semiconductor device production nowadays usually are performed in gas-phase reactors. Therefore, examples will be given, how key growth parameters like growth rate, doping levels and bulk composition can be controlled by applying surface optical systems even under the harsh conditions of semiconductor production lines.