Hamburg 2001 – wissenschaftliches Programm
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O: Oberflächenphysik
O 3: Rastersondentechniken (I)
O 3.7: Vortrag
Montag, 26. März 2001, 12:45–13:00, B
Adhesion and Wear of Pyrolytic Carbon Layers Investigated by Atomic Force Microscopy — •U. Sutter1, A. Pfrang1, W. Send2, D. Gerthsen2, and Th. Schimmel1 — 1Institute for Applied Physics, Universität Karlsruhe, D-76128 Karlsruhe, Germany — 2Laboratory for Electron Microscopy, Universität Karlsruhe, D-76128 Karlsruhe, Germany
Due to their mechanical properties and their temperature stability, pyrolytic carbon coatings are used in a wide variety of applications. Therefore, a thorough understanding of their tribological properties, the adhesion between carbon layer and substrate and the processes leading to tribochemical wear is of great interest. Here, we report on atomic force microscopy studies investigating layer adhesion and wear of pyrolytic carbon films. For this purpose, carbon was deposited on a silicon substrate in a hot wall reactor at 1100∘C. In the early stages of the deposition process, carbon islands with typical diameters between 30 nm and 150 nm are formed on the substrate. By applying defined lateral forces between the AFM tip and individual islands, the force per island area can be determined which is necessary to delaminate individual islands from the substrate. In addition, processes of AFM-tip induced tribochemical wear were studied and quantitatively analyzed in situ during the AFM scan.