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P: Plasmaphysik

P 22: Poster: Magnetische Fusion, Plasmadiagnostik, Dichte Plasmen

P 22.13: Poster

Dienstag, 19. März 2002, 17:40–18:40, HZO Foyer

Langmuir probe measurements at pulsed microwave generated plasmas — •J. Krüger, S. Quell, M. Walker, A. Schulz, J. Feichtinger, K. Hirsch, and U. Schumacher — Institut für Plasmaforschung, Universität Stuttgart, Pfaffenwaldring 31, 70569 Stuttgart

Temporal modulated plasmas play an important role in industrial developments and production. For plasma technological processes like for example film deposition or etching the ratio of relevant radical atoms or molecules can be strongly influenced by a suitable choice of the pulse parameters like pulse/pause proportion or pulse frequency. The Plasmodul [1], an array of four parallel coaxial microwave guides is used as source for a pulsed plasma in Argon and Nitrogen. The plasma is spatially extended with high homogeneity. As a first step of an extensive spectroscopic study of pulsed plasmas in silane and ammonia, plasma parameters like electron density and temperature are investigated spatially and temporally resolved with a Langmuir probe system.

[1] M. Walker, K.-M. Baumgärtner, A. Schulz, E, Räuchle: Silicon nitride films from the PLASMODUL - a new microwave plasma device, Proc. ISPC 14, Prag (1999), Vol. III, p.1427

We acknowledge support by BMBF 13N8048