Bochum 2002 – wissenschaftliches Programm

Bereiche | Tage | Auswahl | Suche | Downloads | Hilfe

P: Plasmaphysik

P 23: Poster: Plasmatechnologie, Plasma-Wand-Wechselwirkung, Staubige Plasmen, Plasmadiagnostik

P 23.1: Poster

Mittwoch, 20. März 2002, 17:40–18:40, HZO Foyer

Investigation on powder formation in C₂H₂ RF discharge by means of FTIR absorption spectroscopy — •E. Kovacevic, I. Stefanovic, J. Berndt, and J. Winter — Institut für Experimentalphysik II, Ruhr Universität Bochum

Recently, in number of studies it was shown that FTIR (Fourier Transform Infrared) absorption spectroscopy is a powerful tool for the investigation of particulate formation and their composition. Deschaneux et al. [1] propose the acetylenic compound (C₂H_x) as a key mechanism for the particle formation and observe sp³ bonded carbon as a basis composition of the plasma produced macroparticles. Following this direction we measured coagulation and growth of powder in a capatcitively coupled C₂H₂ radio-frequency discharge plasma. We observed periodical powder growth with the period of 40 min in our experimental conditions. The strength of Rayleigh scattering was a measure for particle growth. Our in-situ measured IR spectra are in good agreement with ex-situ measurement on collected powder by Stoykov et al. [2].

[1] Ch. Deschenaux et al., J. Phys. D : Appl. Phys. 32 (1999) 1876.

[2] S. Stoykov et al., J. Phys. D : Appl. Phys. 34 (2001) 2160.