Regensburg 2002 – wissenschaftliches Programm

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DS: Dünne Schichten

DS 22: Multilayer II

DS 22.3: Vortrag

Donnerstag, 14. März 2002, 15:30–15:45, HS 31

Soft X-ray scattering of metal-ceramic multilayers — •Alexei Nefedov¹, Hartmut Zabel¹, and Franz Schäfers² — ¹Institut fr Experimentalphysik/Festkörperphysik, Ruhr-Universität Bochum, 44780 Bochum — ²BESSY GmbH, Albert-Einstein-Strasse 15, 12489 Berlin

Imaging with soft x-rays is a very important part of present day thin film technology. For the water window (280 eV - 530 eV) highly reflecting ML mirrors are rare. In a present contribution we report on a novel type of multilayer mirrors for the soft x-ray regime, namely Me/Al₂O₃ (Me=V, Ti) layered stacks with periods Λ from 1.24 to 7.6 nm and number of double layers from 30 to 75 grown by RF sputtering techniques. The period of some multilayers was fitted in order to have a Bragg peak near 45^o(Brewster’s angle) or 90^o (normal incidence). Experimental reflectivities obtained with soft x-ray synchrotron radiation from BESSY are presented. We have performed θ−2θ scans in the region of Bragg reflection at different photon energies as well as energy scans at fixed angles of incidence with special emphasis on the investigation of the L₃ absorption edges. Maximal values of normal incidence reflectance of 0.1% and a reflectance near Brewster’s angle of 3.3% an energy close to the L₃ edge of Ti. We acknowledge funding by DFG (Za 161/14-3).