Regensburg 2002 – wissenschaftliches Programm
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DS: Dünne Schichten
DS 24: Ionenimplantation: Nanocluster- und Schichtsynthese
DS 24.5: Vortrag
Donnerstag, 14. März 2002, 11:30–11:45, HS 32
Ion beam synthesis of amorphous carbon thin films containing metallic nanoclusters — •I. Gerhards1, C. Ronning1, U. Vetter1, H. Hofsäss1, H. Gibhardt2, G. Eckold2, Y.L. Huang3, M. Seibt3, Quan Li4, and S.T. Lee4 — 1II. Physikalisches Institut, Universität Göttingen, Bunsenstr. 7-9, 37073 Göttingen — 2Institut für physikalische Chemie, Universität Göttingen — 3COSDAF, CityUniversity of Hong Kong, China — 4IV. Physikalisches Institut, Universität Göttingen
We investigated the synthesis of metallic nanoparticles during growth of an amorphous carbon matrix. By varying the carbon-to-metal ion ratio, a-C:Cu and a-C:Ag films with metal concentrations between 0 and 50 at. by co-deposition of low energy mass-selected C, Cu and Ag ions. X-ray diffraction and transmission electron mi-croscopy reveals metal particles with diameters of a few nm. The matrix is diamond-like with mainly sp3-bonded carbon at low metal concentrations and becomes graphitic for metal concentrations exceeding 10 at. of the deposited Cu ions are incorporated into the films, most of the deposited Ag ions have disappeared. The residual Ag accumulates at the surface and at the C/Si interface. These observations are discussed in terms of the stability of small Ag clusters and Ag induced interface reactions.