Regensburg 2002 – wissenschaftliches Programm

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DS: Dünne Schichten

DS 25: FV-internes Symposium „Strukturbildung durch Ionenstrahlen“ Teil I

DS 25.1: Hauptvortrag

Donnerstag, 14. März 2002, 13:30–14:00, HS 32

Nanoscale Morphology Control Using Ion Beams — •Michael J. Aziz — Division of Engineering and Applied Sciences; Harvard University; Cambridge, MA 02138; USA

Low energy ion irradiation of a solid surface can be used to control surface morphology on length scales from 1 micron to 1 nanometer. Unfocused ion irradiation induces a spontaneous self-organization of the surface into nanometer-sized ripples, dots, or holes; it also induces diameter increases and decreases in a pre-existing nanopore by a tradeoff between sputter removal of material and stimulated surface mass transport. Here we report experiments that illuminate the kinetics of evolution of the surface morphological instability; the kinetics of decay toward equilibrium once the ion beam is turned off; and the kinetics governing the fabrication of nanopores for single-molecule detectors.