Regensburg 2002 – wissenschaftliches Programm

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HL: Halbleiterphysik

HL 22: Halbleiterlaser

HL 22.6: Vortrag

Dienstag, 12. März 2002, 16:30–16:45, H13

Microwaveguides — •Kamran Avary, Frank Klopf, Johann Peter Reithmaier und Alfred Forchel — Technische Physik, Universität Würzburg, Am Hubland, D-97074 Würzburg, Deutschland

Miniature bending waveguides with very small bending radii down to 2 µm based on GaAs/AlGaAs material have been fabricated. To achieve strong light confinement waveguide structures were fabricated using an electron resonance reactive ion etching technique, which provide smooth surfaces and etch depths more than 3.4 µm. In order to measure the propagation loss coefficient waveguides with a cleaved facet on one side and passive straight waveguides with different lengths and 1.6 µm width were fabricated. The Results show when a deeply etched waveguide structure is used, low radiation loss can be obtained with very small bending radii. The measured radiation loss at a radius of 2 µm was 3 dB/90^∘. These bending waveguides would be suitable for high density integrated optics.