Regensburg 2002 – wissenschaftliches Programm
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O: Oberflächenphysik
O 26: Postersitzung (Rastersondentechniken, Nanostrukturen, Teilchen und Cluster, Methodisches, Oxide und Isolatoren, Grenzfl
äche fest-flüssig, Struktur und Dynamik reiner Oberfl
ächen, Oberfl
ächenreaktionen, Zeitaufg. Spektroskopie, Phasenüberg
änge
O 26.21: Poster
Mittwoch, 13. März 2002, 14:30–17:30, Bereich C
Nanopatterning by electrically induced local CVD with non-contact SFM — •Mihail Croitoru1, Arnim Höchst 1, Günther Bertsche1, Sigmar Roth2 und Dieter Kern1 — 1Universität Tübingen, Institut für Angewandte Physik, Auf der Morgenstelle 10, 72076 Tübingen — 2Max-Planck-Institut für Festkörperphysik, Heisenbergstr. 1, D-70569 Stuttgart
We present a method to fabricate nanometer-scale gold wires for contacting nanotubes on an insulating substrate. The method uses an atomic force microscope (AFM) with commercially available conductive cantilever in non-contact mode, operating at room temperature and ambient pressure. The cantilever tip and sample are immersed into an atmosphere of gold-containing metallorganic vapors. The surface is lithographically prepatterned with electrodes. The application of a positive tip bias induces a local CVD process under the tip by decomposing the adsorbed gas molecules on the electrode surface. The wire is generated by driving the tip starting from an electrode across the insulator towards a feature to be contacted.