Regensburg 2002 – scientific programme
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SYPO: Plasmaoberflächentechnik – Beschichten, Ätzen und Modifizieren
SYPO I: HV I
Monday, March 11, 2002, 14:00–14:45, HS 32
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14:00 | SYPO I.1 | Invited Talk: The physics of plasma-enhanced CVD for large area coating — •Christoph Hollenstein, Alan Howling, and Laurent Sansonnens |