Regensburg 2002 – scientific programme

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SYPO: Plasmaoberflächentechnik – Beschichten, Ätzen und Modifizieren

SYPO I: HV I

Monday, March 11, 2002, 14:00–14:45, HS 32

	14:00	SYPO I.1	Invited Talk: The physics of plasma-enhanced CVD for large area coating — •Christoph Hollenstein, Alan Howling, and Laurent Sansonnens