Aachen PK 2003 – scientific programme

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K: Kurzzeitphysik

K 5: Short time-scale physics, posters

K 5.4: Poster

Thursday, March 20, 2003, 17:30–19:15, Foyer

Laboratory size analysis using compact plasma sources — •Juri Barthel, Konstantin Walter, Klaus Bergmann, and Willi Neff — Fraunhofer ILT, Steinbachstr. 15, 52074 Aachen

Radiation of the spectral range from 1 to 50 nm (XUV) has the potential to explore new fields of application for nano-analysis. Confronting the problem of tuning source, interfaces, optics and detectors to compose a system, concrete examples of applications are given.
A grazing incidence collector is designed and adjusted to a compact plasma source in the view of high photon flux, broad spektral range for spectroskopic analysis and use as a beamsplitter. Setups for transmission and reflection measurements are presented.