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K: Kurzzeitphysik

K III: HV III

K III.1: Hauptvortrag

Mittwoch, 19. März 2003, 11:00–11:30, F04

An Overview About Pulsed Power Modules for Pulsed Gas Lasers — •Claus Strowitzki and Andreas Görtler — TuiLaser AG, Industriestr. 15, D-82110 Germering

In recent years excimer lasers and other pulsed gas laser systems (i.e.TEA-CO2-lasers) have moved into many new applications. Therefore, the system s component lifetime and reliability has to be improved. One key element is the pulsed power module. The classic way is the use of thyratrons to generate the high voltage pulse to initiate the pulsed gas discharge. These pulsed power modules are still used in high power and low repetition rate excimer laser systems. For high repetitive laser systems semiconductor switches with additional pulse compression stages are used. An overview of the different concepts to generate the pulsed power will be given. The advantages and disadvantages of the different realized concepts will be discussed and an outlook for the future developments will be given.