Aachen PK 2003 – wissenschaftliches Programm

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P: Plasmaphysik

P 10: Poster II

P 10.11: Poster

Dienstag, 18. März 2003, 17:30–19:15, Foyer

Modeling ionisation and transport of sputtered material in magnetron sources — •Philippa Browning, Raffaello Sobbia, and James Bradley — Dept of Physics, UMIST, PO Box 88, Manchester, M60 1QD, U.K.

We describe modeling of the UMIST unbalanced planar magnetron source. A model of the transport of energetic secondary electrons has been developed, whereby trajectories of an ensemble of electrons are followed incorporating ionisation, excitation and elastic collisions with background gas (Argon) using a Monte-Carlo technique. The volume distribution of ionisation is calculated, and the erosion profile on the cathode. We then investigate the transport of sputtered titanium and its deposition on the substrate. The emission profile of titanium is determined from the previously calculated ion impacts. The atoms are then followed, including collisions with background gas, until they hit the substrate or are otherwise lost. The resulting volumetric density is then coupled with the electron transport code to determine the distribution of Titanium ionisation and excitation, which is compared with measurements (Christou and Barber; J Vac Sci Tech. A, 18, 2897; 2000).