Aachen PK 2003 – wissenschaftliches Programm

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P: Plasmaphysik

P 10: Poster II

P 10.2: Poster

Dienstag, 18. März 2003, 17:30–19:15, Foyer

Modified global model applied to argon ICP discharges — •S.Vikram Singh, S.Vikram Singh, Yuri Ivanov, Henning Soltwisch, Yuri Ivanov, and Henning Soltwisch — Institute for Experimental physics V, Ruhr-University Bochum, 44780 Bochum, Germany

The volume-averaged "global" model for noble gases was developed by Lieberman [1]. The main idea of a global model is to neglect the complexity of the spatial profiles in the plasma chamber and to obtain the qualitative picture how one parameter depends on another. To improve this situation, the influence of the geometry of the cell on the electron density and temperature as well as the dependence from the different electron distribution functions, step-wise ionization and spatial density profiles is investigated. The global model results are compared with Langmuir probe measurements performed on a standard GEC-reference cell with planar antenna coil in a pressure range from 1 to 15 Pa [2]. The radially resolved profiles are obtained by radial movement of the probe head.

1. M.A. Lieberman, A.J. Lichtenberg 1994 Principles of plasma discharges and materials processing;

2. S.V. Singh, Yu.Ivanov, H. Soltwisch 2002 Cz. J. Phys. D 52 576;