Aachen PK 2003 – wissenschaftliches Programm
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P: Plasmaphysik
P 10: Poster II
P 10.36: Poster
Dienstag, 18. März 2003, 17:30–19:15, Foyer
Dust Formation and Plasma Response in Ar/C2H2 RF Discharge — •Eva Kovacevic, Ilija Stefanovic, Johannes Berndt, and Jörg Winter — Institute for Experimental Physics II, Ruhr-University Bochum
An investigation of particulate formation in plasmas is of great interest for various branches from nanotechnology to astrophysics. We focused on study of dust formation in Ar/C2H2 gas mixtures. To gain an insight in the precursors and the growth mechanism of the dust formation, as well as the plasma behaviour in the presence of dust, we used several in-situ diagnostic techniques as: in-situ FTIR spectroscopy, plasma-ion mass spectroscopy and optical emission spectroscopy. Ex situ diagnostic (SEM, TEM) gave us the information of the shape and origin of the particles. Multi-pass FTIR spectra provided instant information of appearance of absorbing particles. The scattered component of spectra was used for tracing the dust growth in the plasma. Observed was periodicity in dust formation correlated with the immense plasma dynamics response (drastic changes in positive ions behaviour, periodicity in Balmer Hα line broadening).