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P: Plasmaphysik

P 10: Poster II

P 10.44: Poster

Dienstag, 18. März 2003, 17:30–19:15, Foyer

Time and space resolved EUV spectrometry and pinhole imaging on the Philips Hollow Cathode discharge — •Erik Kieft¹, Joost van der Mullen¹, Vadim Banine², and Gerrit Kroesen¹ — ¹Department of Applied Physics, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands — ²ASM Lithography B.V., P.O. Box 324, 5500 AH Veldhoven, The Netherlands

A research version of the Philips EUV hollow cathode discharge plasma source was studied in the ASML EUV laboratory, using a pinhole camera, an EUV spectrometer, a fast gatable multichannel plate EUV detector and a digital camera.

After initial characterization, identifying a ring phase, a pinch phase and a decay phase in the plasma pulse, detailed space resolved EUV spectrometry has now been performed on the ring phase of the plasma. Through the application of Abel inversion, the time-dependent relative intensities of different EUV lines, characteristic for different ionization stages of xenon, have been determined as a function of distance from the discharge axis.

Furthermore, new time resolved pinhole images show EUV emission from inside the hollow cathode at the beginning of the discharge. An EUV spectrum has been recorded for this initial phase.