Aachen PK 2003 – wissenschaftliches Programm

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P: Plasmaphysik

P 10: Poster II

P 10.46: Poster

Dienstag, 18. März 2003, 17:30–19:15, Foyer

Investigation of interactions between fluid metal surfaces and plasmas — •Jens Ränsch, Suk-Ho Hong, Johannes Berndt, and Jörg Winter — Ruhr-Universität Bochum, Lehrstuhl f. Experimentalphysik II, 44780 Bochum

We have investigated sputtering of liquid Gallium exposed to a pure Ar plasma in a standard GEC cell. 13.56MHz RF power is capacitively coupled to the lower electrode. The liquid Ga is placed at the center of the lower electrode. The presence of the Ga in the Ar plasma is measured by means of optical emission spectroscopy. The measured Ga emission lines correspond to transitions into the atom?s ground state: the power dependence, pressure dependence and the influence of the gas flow were investigated.

The intensity of the Ga lines is very sensitive to pressure and gas flow variations. We assume that the latter is due to a supression of reoxidation of the (partially) sputter-cleaned Ga surface since oxygen atoms and compounds are better flushed out of the system in the high flow regime.

In a next step we plan to analyse the density of Ga atoms within the plasma by means of absorption techniques.