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P: Plasmaphysik

P 17: Poster III

P 17.19: Poster

Donnerstag, 20. März 2003, 17:30–19:15, Foyer

Emission spectroscopic measurements of axial hydrogen atom densities in an inductively coupled plasma — •V. Schulz-von der Gathen¹, M. Abdalla¹, T. Gans², and H.F. Döbele¹ — ¹Inst.f.Experimentelle Physik, Universität Essen, 45117 Essen — ²Inst.f.Experimentalphysik V, Ruhr-Universität Bochum, 44780 Bochum

We present emission spectroscopic measurements of axial hydrogen atom density profiles in an inductively coupled plasma. The discharge is operated at RF powers of 100 to 500 W at a frequency of 13.56 MHz. Gas pressures between 10 and 50 Pa are utilized. The working gas is a mixture of 95% of molecular hydrogen and a 5% mixture of noble gases. The gas temperature between coil and cooled grounded counter electrode is determined from the analysis of rotational Fulcher bands. The atomic hydrogen densities are determined from a modified actinometry taking special care of the dissociative excitation channel. The observed degree of dissociation is on the order of 5% in the center of the discharge.

This project is supported by a grant of the Universität Essen.