Aachen PK 2003 – scientific programme

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P: Plasmaphysik

P 17: Poster III

P 17.39: Poster

Thursday, March 20, 2003, 17:30–19:15, Foyer

Non-thermal plasmas as a sterilization- and coating technique for surfaces — •Christian Schrader¹, Lutz Baars-Hibbe¹, Philipp Sichler², Karl-Heinz Gericke ¹, and Stephanus Büttgenbach² — ¹Institut für Physikalische und Theoretische Chemie, Technische Universität Braunschweig, Hans-Sommer-Strasse 10, D-38106 Braunschweig, Germany — ²Institut für Mikrotechnik, Technische Universität Braunschweig, Alte Salzdahlumer Str. 203, D-38124 Braunschweig, Germany

A non-thermal plasma source (13.56MHz)which can be operated in a wide pressure range applying only moderate voltages is presented. It was used for deactivation of bacterial- and fungus spores on surfaces and for the deposition of SiO₂-films with only minor techn. modifications. The success of the plasma induced processes is a function of many parameters. The importance of these parameters will be discussed in some detail.

We successfully sterilized 10⁶ spores of the bacteria B. cereus at 1000mbar in Helium and the same quantity of spores of the fungus A. niger in Ar. These spores serve as a reference for the total deactivation by established methods like the treatment with H₂O₂-solution respectively UV-radiation. To make the reactive particles of the plasma bridge the gap of 2mm between the plasma source and the substrate inoculated by 0,05ml of the probe suspension we used an acceleration potential.

We also explored successfully the possibility to deposit SiO₂ layers at 100mbar with tetraethoxysilane (TEOS) as monomer. The obained plasma polymerized films were characterized by STM, ellipsometry and gas-phase mass spectrometry