Aachen PK 2003 – wissenschaftliches Programm
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P: Plasmaphysik
P 6: Dusty Plasmas
P 6.1: Vortrag
Dienstag, 18. März 2003, 11:30–11:50, FO2
Optical and electrical measurements in an Ar-Silane RF capacitively coupled plasma. — •Mikhail Sorokin1, Raffaele Ghidini2, Charlotte Groothuis1, Winfred Stoffels1, and Gerrit Kroesen1 — 1Department of Physics, Eindhoven University of Technology, P.O. Box, 5600 MB Eindhoven, The Netherlands — 2On leave from: Department of Electrical Engineering, University of Bologna, 40136 Bologna, Italy
Capacitively coupled Radio Frequency discharges are widely used in a photovoltaic cell production. Under most conditions dust particles are being formed in the plasma reactors. Again, under certain conditions, nanometer sized particles incorporate themselves into the silicon layers of the photovoltaic cells, which leads to a significant increase in quality of the product. To find and control these conditions we monitor the plasma electrical parameters - voltage, current and phase shift between the voltage and the current for the first five harmonics. At the same time we look at the optical emission from the plasma and at the intensity of a laser light scattered on the particles. We performed experiments for different gas temperatures from 17oC till 180oC. In this work we present results of those measurements, where we correlate the behavior of those harmonics with the particle formation in the plasma chamber.