Dresden 2003 – scientific programme

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DS: Dünne Schichten

DS 12: Schichtwachstum II

DS 12.2: Talk

Wednesday, March 26, 2003, 15:30–15:45, GER/37

Range distributions of low–energy carbon ions: a base for subplantation growth models models — •Peter Neumaier¹, G. Dollinger¹, A. Bergmaier¹, W. Eckstein², R. Fischer², L. Görgens¹, H. Hofsäss³, H.U. Jäger⁴, H. Kröger³ und C. Ronning³ — ¹Technische Universität München, Physik Department E12,James–Franck–Str. , D–85748 Garching, Germany — ²Centre forInterdisciplinary Plasma Science, Max–Planck–Institut für Plasmaphysik,EURATOM Association, Boltzmannstr. 2, D–85748 Garching, Germany — ³Universität Göttingen, II. Physikalisches Institut,Bunsenstr. 7–9, D–37073 Göttingen, Germany — ⁴Forschungszentrum Rossendorf e. V. , Institut für Ionenstrahlphysik und Materialforschung,Postfach 510119, D–01314 Dresden, Germany

Range distributions of carbon ions deposited onto tetrahedral amorphous carbon films at kinetic energies between 22 eV and 692 eV are measured utilizing high–resolution elastic recoil detection. These data are compared to range calculations based on binary collision approximation as well as to classical molecular dynamics simulations. Asymmetric range profiles, differences in mean ion ranges and increased range straggling compared to theories are attributed due to self diffusion during thermal spike as well as to intrinsic surface properties of the carbon samples which have to be considered in subplantation growth models.