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DS: Dünne Schichten

DS 17: Ionenimplantation II

DS 17.6: Vortrag

Donnerstag, 27. März 2003, 11:30–11:45, GER/37

Development of Nanosystems in TiO₂ by Ion Implantation — •R. Fromknecht¹, L.M. Wang², S. Zhu², K. Sun², A. van Veen³, M.A. van Huis³, T. Weimann⁴, J. Wang⁴, J. Niemeyer⁴, F. Eichhorn⁵, and T. Wang⁵ — ¹Forschungszentrum Karlsruhe, IFP — ²The University of Michigan, Dept. of Nucl. Eng. and Rad. Sci. — ³Delft Univ. of Technology — ⁴PTB Braunschweig — ⁵Forschungszentrum Rossendorf

Au-ions were implanted into TiO₂ single crystals with doses ranging from 2×10¹⁶ Au⁺/cm² at RT and 1000 K. At RT implanted samples were then thermally annealed at temperatures of 550 K to 1550 K. The Au-atoms precipitate to nanocrystals already during implantation at RT with an average particle size of 1.5 nm. HRTEM investigations revealed that the Au-nanocrystals, embedded in amorphous TiO₂ regions, have a broad size and range distribution varying from large sizes in the near surface region to smaller sizes at larger depths. In the annealing process a reorientation of the Au-nanocrystals is observed, with the main effect of a decrease of the (111) peak and an increase of the (200)-peak in the XRD spectra. After annealing at 1000 K the particle size of the highly textured Au-implant was evaluated to ∼6 nm; this means that during annealing the particles grow, leading to a partially coherent orientation in the disordered TiO₂-matrix. Au implantation at RT performed through a metal mask with holes resulted in a narrow size distribution (2-6 nm) of the Au-nanocrystals in the near surface region.