Dresden 2003 – scientific programme

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DS: Dünne Schichten

DS 24: Poster

DS 24.10: Poster

Tuesday, March 25, 2003, 14:30–17:00, P2a

Ion beam assisted smoothing of optical surfaces — •Frank Frost, Renate Fechner, Dieter Flamm, Bashkim Ziberi, Axel Schindler, and Bernd Rauschenbach — Leibniz-Institut für Oberflächenmodifizierung e. V., Permoserstrasse 15, D-04318 Leipzig, Germany

In this work different ion beam techniques demonstrate their capability for surface roughness reduction down to sub-nanometer scale. In ion beam direct smoothing, favorable characteristics in the development of surface topography are exploited and smoothing with the help of planarization layers are evaluated. Focusing on the common optical substrate materials quartz (fused silica) and silicon, it is shown that a surface roughness reduction down to the ∼ 0.1 nm rms level can be achieved by optimization and combination of these techniques.