DPG Phi
Verhandlungen
Verhandlungen
DPG

Dresden 2003 – scientific programme

Parts | Days | Selection | Search | Downloads | Help

DS: Dünne Schichten

DS 24: Poster

DS 24.18: Poster

Tuesday, March 25, 2003, 14:30–17:00, P2a

Growth and structural properties of ZnO thin films on Al2O3 and Au on ZnO — •Murat Ay, Alexei Nefedov, and Hartmut Zabel — Institut für Experimentalphysik IV Ruhr-Universität Bochum 44780 Bochum Germany

ZnO films have been grown on Al2O3 substrates by RF sputtering from an ZnO target using 5x10−3 mbar of pure Ar as sputter gas. The temperature during growth was varied between room temperature and 500C. After the growth the films were annealed in order to increase the film quality. The annealing was performed in an oxygen atmosphere with a partial pressure of 1000 mbar and in a UHV chamber with the possibility to monitor in-situ the structural quality by RHEED and mass spectrometry. The ZnO/Al2O3 samples were investigated by x-ray scattering and atomic force microscopy. The thickness and roughness of the samples have been studied by x-ray reflectivity and AFM, while the crystalline structure has been determined by high angle x-ray diffraction. The x-ray measurements were performed at the beamline W1.1 at HASYLAB and with the rotation anode generator in Bochum. The optimized ZnO films were epitaxial and had a mosaicity of 0.60 with a surface roughness of less than 3 Å. Subsequently, the ZnO/Al2O3 substates with the best quality were used for Au deposition by DC and RF sputtering at different temperatures.

100% | Mobile Layout | Deutsche Version | Contact/Imprint/Privacy
DPG-Physik > DPG-Verhandlungen > 2003 > Dresden