Dresden 2003 – wissenschaftliches Programm
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DS: Dünne Schichten
DS 24: Poster
DS 24.54: Poster
Dienstag, 25. März 2003, 14:30–17:00, P2a
Interface roughness of laser deposited metal/MgO multilayers — •Christian Fuhse1, Andreas Meschede1, Satish Vitta2, Göran Johansson3, and Hans-Ulrich Krebs1 — 1Institut für Materialphysik, Universität Göttingen, 37073 Göttingen — 2Department of Metallurgical Engineering and Materials Science, Indian Institute of Technology, Bombay, Mumbai 400 076, India — 3Biomedical and X-Ray Physics, Royal Institute of Technology/SCFAB, SE-10621 Stockholm, Sweden
Metal/MgO multilayers (metal=Fe, Ni80Nb20, Ti) with periods in the nanometer range were deposited by pulsed laser deposition in UHV and characterized by hard x-ray reflectivity. In both amorphous and crystalline systems it was found that the interface roughness is below 0.5 nm and only slightly depends on the number of deposited bilayers. In contrast, it strongly depends on the bilayer thickness and increases for ultra-thin layer thicknesses. Furthermore, the thermal stability of the multilayers was studied. No decrease in reflectivity was observed at temperatures up to 300 ∘C and the multilayer structure decays not before 550 ∘C. The applicability of these multilayers as mirrors for soft x-ray radiation in the “water window” region (λ=2.3–4.4 nm) was investigated by reflectivity measurements using a laser-plasma-based soft x-ray reflectometer (λ=3,374 nm).