Dresden 2003 – wissenschaftliches Programm

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HL: Halbleiterphysik

HL 14: Poster I

HL 14.39: Poster

Montag, 24. März 2003, 17:00–19:30, HSZ/P2

Liquid metal ion sources for FIB implantation of magnetic ions — •Alexander Melnikov¹, Sinan Uenluebayir¹, Safak Gök¹, Peter Schafmeister¹, Rolf Wernhardt¹, Peter Stauche², Dirk Reuter¹, and Andreas D. Wieck¹ — ¹Angewandte Festkörperphysik — ²Festkörperphysik, Ruhr-Universität Bochum, Universitätsstraße 150 D-44780 Bochum

Focused ion beams (FIB) are used in many fields of research for maskless fabrication of nanostructures. There is thus an increasing interest in a lot of different ion species to be implanted by FIB, especially in the implantation of magnetic ions for creation of ferromagnetic regions. To obtain appropriate ions, liquid metal ion sources (LMIS) with long operation times were developed on the basis of binary and ternary alloys. The components ratio calculation for ternary alloys was based on the binary phase diagrams. The ion source consists of a tungsten-needle emitter with a surface tension based spiral reservoir for the alloy. Alloys as DyNi, CoDy, HoNi, FePr, AuGeMn, AuGeDy or AuSiDy were used to obtain Mn, Co, Ni, Fe, Dy, Ho and Pr ions. I-V characteristics as well as mass spectra were investigated for the developed sources. Features of the ion beam composition emitted by different LMIS were analyzed. The FIB implantation of magnetic ions shows the feasibility of nanostructure fabrication in semiconductors.