Dresden 2003 – wissenschaftliches Programm
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HL: Halbleiterphysik
HL 34: Transporteigenschaften
HL 34.2: Vortrag
Mittwoch, 26. März 2003, 17:00–17:15, POT/81
AFM-Lithography on Cleaved Edges of Ga[Al]As-Heterostructures — •E. Reinwald1, M. Lermer1, M. Rahm1, W. Wegscheider1, D. Weiss1, D. Schuh2, M. Bichler2, and G. Abstreiter2 — 1Universtät Regensburg, Institut für Experimentelle und Angewandte Physik, 93040 Regensburg — 2Walter Schottky Institut, Technische Universität München, Am Coulombwall, 85748 Garching
Our aim is to create a two-dimensional electron system with modulation in both directions. In these systems magnetotransport experiments are supposed to reveal an energy signature, known as the Hofstatter butterfly. Modulation in one dimension can be achieved by cleaved-edge overgrowth of a GaAs/AlGaAs superlattice, which was demonstrated in previous experiments. The modulation in the second direction can be generated by anodic oxidation with an atomic force microscope (AFM). We have fabricated one-dimensional lattices by oxidizing the surface of a Ga[Al]As heterostructure. The modulation of the 2DEG has been measured by magnetotransport experiments. For the first time we have written lattices with AFM-oxidation at a cleaved edge with periods down to 50 nm. Furthermore we present a method to contact the 2DEG on the cleaved edge in hallbar geometry. Thus all technological requirements are available to realize the experiments mentioned above.
This project is supported by the DFG Schwerpunktprogramm 1092 and by the BMBF (01BM918).